• DocumentCode
    2875292
  • Title

    Epitaxial growth of AlAsxSb1-x by MOCVD

  • Author

    Chen, Wei-Kuo ; Ou, Jehn

  • Author_Institution
    Chiao-Tung University
  • fYear
    1994
  • fDate
    1994
  • Firstpage
    21505
  • Lastpage
    22601
  • Keywords
    Chemical vapor deposition; Epitaxial growth; III-V semiconductor materials; Indium phosphide; Optical films; Optical microscopy; Optoelectronic devices; Scanning electron microscopy; Solids; Temperature dependence;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
  • Type

    conf

  • DOI
    10.1109/EDMS.1994.771313
  • Filename
    771313
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2875292