Title :
High quality thin oxide films formed by using ultra low temperature liquid phase deposition
Author :
Yeh, Ching-Fa ; Lin, Shyue-Shyh ; Hong, Tzy-Yan
Author_Institution :
National Chiao-Tung University
Keywords :
Dielectric liquids; Dielectric thin films; Electric breakdown; Etching; Leakage current; Optical films; Silicon compounds; Substrates; Surface topography; Temperature;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771352
