DocumentCode

2875430

Title

Factors influencing the oxidation of silicon catalyzed by Cu₃Si at room temperature

Author

Liu, C.S. ; Chen, L.J.

Author_Institution

National Tsing Hua University

fYear

1994

fDate

1994

Firstpage

30277

Lastpage

31373

Keywords

Electrons; Grain boundaries; Grain size; Oxidation; Semiconductor films; Silicides; Silicon; Substrates; Temperature; X-ray scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International

Type

conf

DOI

10.1109/EDMS.1994.771353

Filename

771353