Title :
Planarizing dielectrics for VLSI technology
Author :
Liu, ChiWen ; Dai, BauTong ; Yeh, ChingFa ; Liu, ChienHung ; Wang, PoTsun
Author_Institution :
National Chiao Tung University
Keywords :
Chemical technology; Dielectric films; Dielectric materials; Dielectric measurements; Etching; Laboratories; Planarization; Scanning electron microscopy; Thickness measurement; Very large scale integration;
Conference_Titel :
Electron Devices and Materials Symposium, 1994. EDMS 1994. 1994 International
DOI :
10.1109/EDMS.1994.771354
