Title :
Practical versus theoretical limits of VLSI
Author :
Berglund, C. ; Jaeger, Richard C.
Author_Institution :
Intel Corp., Aloha, OR, USA
Abstract :
Historically, predictions of limits to VLSI technology have been based on fundamental and theoretical laws of physics. In recent years, it has become evident that the major limitations to VLSI technology advancement are more practical in nature. These include tradeoffs between reliability and scaling, complexity, available tools and equipment, voltage standards, and magnitude of capital investment, as well as fundamental, material, device and circuit limits. . . Panelists will address these issues as they apply to VLSI evolution over the next five to ten years, and attempt to define the key bottlenecks in reaching theoretical limits.
Keywords :
Circuits; Costs; Engineering management; Lithography; MOSFETs; Research and development management; Silicon; Steel; Technology management; Very large scale integration;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1983 IEEE International
Conference_Location :
New York, NY, USA
DOI :
10.1109/ISSCC.1983.1156425