• DocumentCode
    2875793
  • Title

    Electrical characteristics in a low pressure ferrite-free inductively coupled discharge

  • Author

    Chen, Yuming ; Liu, Yang

  • Author_Institution
    Inst. for Electr. Light Sources, Fudan Univ., Shanghai, China
  • fYear
    2011
  • fDate
    7-10 Nov. 2011
  • Firstpage
    2919
  • Lastpage
    2922
  • Abstract
    The electrical parameters of a low pressure ferrite-free inductively coupled discharge have been investigated. In the experiment plasma can be considered as a one-turn secondary load of an air-core transformer. The electrical conductivity ratio between the image part and the real part σir can be obtained through calculating Maxwell equations. The electrical characteristics can be obtained by the calculation of the equivalent circuit.
  • Keywords
    Maxwell equations; discharges (electric); electrical conductivity; Maxwell equations; air-core transformer; electrical conductivity ratio; electrical parameters; equivalent circuit calculation; low pressure ferrite-free inductively coupled discharge; one-turn secondary load; Capacitance; Coils; Couplings; Discharges; Inductance; Plasma sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IECON 2011 - 37th Annual Conference on IEEE Industrial Electronics Society
  • Conference_Location
    Melbourne, VIC
  • ISSN
    1553-572X
  • Print_ISBN
    978-1-61284-969-0
  • Type

    conf

  • DOI
    10.1109/IECON.2011.6119616
  • Filename
    6119616