• DocumentCode
    2876131
  • Title

    Scheduling for the Dedicated Machine Constraint in Semiconductor Manufacturing Using a Goal-Oriented Approach

  • Author

    Pham, Huy Nguyen Anh ; Shr, Arthur ; Chen, Peter P.

  • Author_Institution
    Dept. of Comput. Sci., Louisiana State Univ., Baton Rouge, LA, USA
  • fYear
    2009
  • fDate
    2-4 Nov. 2009
  • Firstpage
    551
  • Lastpage
    558
  • Abstract
    Semiconductor manufacturing with the dedicated machine constraint is a new challenge for scheduling problems. Previous studies have either not taken this constraint into account or proposed heuristic approaches which might not provide the efficient makespan and the efficient time. This paper proposes a goal-oriented approach called the optimization of makespan, load, and execution time (OMLE) approach which considers the above issues. The desired goals find a schedule for machines which simultaneously optimizes the makespan and the load among machines in an efficient time. Experiments are presented to validate the approach.
  • Keywords
    optimisation; semiconductor industry; single machine scheduling; dedicated machine constraint scheduling; execution time; goal-oriented approach; makespan optimization; semiconductor manufacturing; Computer aided manufacturing; Fabrication; Job shop scheduling; Lithography; Manufacturing systems; Processor scheduling; Production facilities; Scheduling algorithm; Semiconductor device manufacture; Semiconductor device modeling; Dedicated Machine Constraint; Load; Optimization of Makespan; and Execution time (OMLE); goal-oriented; scheduling; semiconductor manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Tools with Artificial Intelligence, 2009. ICTAI '09. 21st International Conference on
  • Conference_Location
    Newark, NJ
  • ISSN
    1082-3409
  • Print_ISBN
    978-1-4244-5619-2
  • Electronic_ISBN
    1082-3409
  • Type

    conf

  • DOI
    10.1109/ICTAI.2009.14
  • Filename
    5366959