DocumentCode
2876131
Title
Scheduling for the Dedicated Machine Constraint in Semiconductor Manufacturing Using a Goal-Oriented Approach
Author
Pham, Huy Nguyen Anh ; Shr, Arthur ; Chen, Peter P.
Author_Institution
Dept. of Comput. Sci., Louisiana State Univ., Baton Rouge, LA, USA
fYear
2009
fDate
2-4 Nov. 2009
Firstpage
551
Lastpage
558
Abstract
Semiconductor manufacturing with the dedicated machine constraint is a new challenge for scheduling problems. Previous studies have either not taken this constraint into account or proposed heuristic approaches which might not provide the efficient makespan and the efficient time. This paper proposes a goal-oriented approach called the optimization of makespan, load, and execution time (OMLE) approach which considers the above issues. The desired goals find a schedule for machines which simultaneously optimizes the makespan and the load among machines in an efficient time. Experiments are presented to validate the approach.
Keywords
optimisation; semiconductor industry; single machine scheduling; dedicated machine constraint scheduling; execution time; goal-oriented approach; makespan optimization; semiconductor manufacturing; Computer aided manufacturing; Fabrication; Job shop scheduling; Lithography; Manufacturing systems; Processor scheduling; Production facilities; Scheduling algorithm; Semiconductor device manufacture; Semiconductor device modeling; Dedicated Machine Constraint; Load; Optimization of Makespan; and Execution time (OMLE); goal-oriented; scheduling; semiconductor manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Tools with Artificial Intelligence, 2009. ICTAI '09. 21st International Conference on
Conference_Location
Newark, NJ
ISSN
1082-3409
Print_ISBN
978-1-4244-5619-2
Electronic_ISBN
1082-3409
Type
conf
DOI
10.1109/ICTAI.2009.14
Filename
5366959
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