Dedicated Machine Constraint Scheduling as a Shortest-Path Problem

This paper proposes a graph framework to undertake the issue of scheduling for dedicated machine constraint in the semiconductor manufacturing system. By finding the shortest paths in the graph, the framework finds the best scheduling result with an optimal makespan for the system. The framework first constructs a graph based on the current situation and then schedules wafers to machines under the constraint. Experiments are presented to validate the proposed graph framework.