Author :
Mohsen, A. ; Madland, P. ; Simonsen, C. ; Hamdy, E. ; King, Grant W. ; McCollum, John ; Wood, Alan
Author_Institution :
Intel Corp., Aloha, OR, USA
Abstract :
A 154 mil2NMOS 64K DRAM with 80ns row access and 65ns fast page mode cycle time, affording low SER (≪ 10 Fits at 1μs cycle), will be repoorted. A conventional 77μm2one-transistor cell used 150Å capacitor oxide and double field oxidation to reduce birds beak.
Keywords :
Capacitance; Charge measurement; Circuits; Clocks; Current measurement; Current supplies; Delay; Fuses; Plastic packaging; Random access memory;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1983 IEEE International
Conference_Location :
New York, NY, USA
DOI :
10.1109/ISSCC.1983.1156471