DocumentCode :
2876826
Title :
Design and Characterisation of High-Q Solidly-Mounted Bulk Acoustic Wave Filters
Author :
Strijbos, Remco ; Jansman, André ; Lobeek, Jan-Willem ; Li, Nancy Xin ; Pulsford, Nick
Author_Institution :
NXP Semicond., Nijmegen
fYear :
2007
fDate :
May 29 2007-June 1 2007
Firstpage :
169
Lastpage :
174
Abstract :
In this paper bulk-acoustic-wave (BAW) resonators with high Q-factor Qa at anti-resonance are demonstrated based on a redesigned reflector stack and a lateral design with a guard ring at the border of the resonator. Experimentally a clear maximum of Qa together with optimal suppression of spurious modes in the inductive region is observed for a guard ring width of about 7 mum. It is demonstrated that by measuring resonators of different size and aspect ratio, bulk and edge loss mechanisms can be differentiated. Furthermore, the most relevant part of the dispersion curve for the main acoustic mode can be extracted. The observed trends are confirmed by a recently developed finite element model.
Keywords :
Q-factor; acoustic resonator filters; bulk acoustic wave devices; finite element analysis; acoustic mode; antiresonance; aspect ratio; bulk-acoustic-wave resonators; dispersion curve; finite element model; guard ring; high-Q solidly-mounted bulk acoustic wave filters; loss mechanisms; redesigned reflector stack; size 7 mum; spurious modes; Acoustic measurements; Acoustic waves; Film bulk acoustic resonators; Frequency; Mirrors; Q factor; Reflectivity; Resonance; Resonator filters; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Components and Technology Conference, 2007. ECTC '07. Proceedings. 57th
Conference_Location :
Reno, NV
ISSN :
0569-5503
Print_ISBN :
1-4244-0984-5
Electronic_ISBN :
0569-5503
Type :
conf
DOI :
10.1109/ECTC.2007.373793
Filename :
4249879
Link To Document :
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