• DocumentCode
    2877038
  • Title

    Microstructure evolution of Cu/Sn/Cu bonding stacks impacts on their mechanical properties

  • Author

    Byunghoon Lee ; Lee, Hoo-Jeong

  • Author_Institution
    Sch. of Adv. Mater. Sci. & Eng., Sungkyunkwan Univ., Suwon, South Korea
  • fYear
    2011
  • fDate
    4-7 July 2011
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We examined the effects of the bonding temperature on the bonding morphology, electrical resistance and mechanical properties of a Cu/Sn/Cu bonding structure. By carefully characterizing the bonding morphology using several analytical methods (SEM, TEM, and EDS), we successfully unravelled that bonding the samples under various bonding temperatures produced greatly different bonding morphologies - and different prevailing phases in the bonded layer. Mechanically testing the samples bonded under different conditions generates the joint strength data of the samples, which confirm a sensitive dependence of the joint strength on the bonding conditions. In general, the samples bonded at the higher temperatures show a higher bonding strength and the strength escalates with the bonding temperature increasing. Connecting the mechanical data with the SEM analysis results reveals an intimate process-microstructure-property interrelationship that bonding samples under various process conditions produce different microstructures, which, in turn, lead to much different joint strengths.
  • Keywords
    X-ray chemical analysis; copper; crystal microstructure; electric resistance; integrated circuit bonding; integrated circuit interconnections; mechanical properties; scanning electron microscopy; tin; transmission electron microscopy; Cu-Sn-Cu; SEM; bonding morphology; bonding strength; bonding structure; bonding temperature; electrical resistance; mechanical properties; microstructure; process-microstructure-property interrelationship; Bonding; Copper; Intermetallic; Joints; Microstructure; Soldering; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
  • Conference_Location
    Incheon
  • ISSN
    1946-1542
  • Print_ISBN
    978-1-4577-0159-7
  • Electronic_ISBN
    1946-1542
  • Type

    conf

  • DOI
    10.1109/IPFA.2011.5992730
  • Filename
    5992730