DocumentCode
2877038
Title
Microstructure evolution of Cu/Sn/Cu bonding stacks impacts on their mechanical properties
Author
Byunghoon Lee ; Lee, Hoo-Jeong
Author_Institution
Sch. of Adv. Mater. Sci. & Eng., Sungkyunkwan Univ., Suwon, South Korea
fYear
2011
fDate
4-7 July 2011
Firstpage
1
Lastpage
3
Abstract
We examined the effects of the bonding temperature on the bonding morphology, electrical resistance and mechanical properties of a Cu/Sn/Cu bonding structure. By carefully characterizing the bonding morphology using several analytical methods (SEM, TEM, and EDS), we successfully unravelled that bonding the samples under various bonding temperatures produced greatly different bonding morphologies - and different prevailing phases in the bonded layer. Mechanically testing the samples bonded under different conditions generates the joint strength data of the samples, which confirm a sensitive dependence of the joint strength on the bonding conditions. In general, the samples bonded at the higher temperatures show a higher bonding strength and the strength escalates with the bonding temperature increasing. Connecting the mechanical data with the SEM analysis results reveals an intimate process-microstructure-property interrelationship that bonding samples under various process conditions produce different microstructures, which, in turn, lead to much different joint strengths.
Keywords
X-ray chemical analysis; copper; crystal microstructure; electric resistance; integrated circuit bonding; integrated circuit interconnections; mechanical properties; scanning electron microscopy; tin; transmission electron microscopy; Cu-Sn-Cu; SEM; bonding morphology; bonding strength; bonding structure; bonding temperature; electrical resistance; mechanical properties; microstructure; process-microstructure-property interrelationship; Bonding; Copper; Intermetallic; Joints; Microstructure; Soldering; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location
Incheon
ISSN
1946-1542
Print_ISBN
978-1-4577-0159-7
Electronic_ISBN
1946-1542
Type
conf
DOI
10.1109/IPFA.2011.5992730
Filename
5992730
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