Title :
Drain bias stress-induced degradation in amorphous silicon thin film transistors with negative gate bias
Author :
Zhou, Dapeng ; Wang, Mingxiang ; Lu, Xiaowei ; Zhou, Jie
Author_Institution :
Dept. of Microelectron., Soochow Univ., Suzhou, China
Abstract :
In this study, degradation of amorphous silicon thin film transistors (a-Si TFTs) under drain bias (Vd) stresses with fixed negative gate bias (Vg) has been investigated. For DC Vd stress, state creation mechanism dominates the threshold voltage (Vth) degradation for relative large negative Vgd (Vg-Vd) while state creation and/or electron trapping dominates for positive Vgd. For AC Vd stress, state creation, electron trapping and hole trapping contribute to the degradation. Dominant mechanism depends on stress time, frequency and the polarity of Vgd. Decreasing stress voltage suppresses state creation and/or hole trapping for -Vgd condition, but enhances state creation and/or electron trapping for +Vgd condition.
Keywords :
electron traps; elemental semiconductors; hole traps; semiconductor device reliability; semiconductor device testing; silicon; thin film transistors; Si; amorphous silicon thin film transistors; drain bias stress-induced degradation; electron trapping; hole trapping; negative gate bias; state creation mechanism; threshold voltage degradation; Amorphous silicon; Charge carrier processes; Degradation; Logic gates; Stress; Thin film transistors; Threshold voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the
Conference_Location :
Incheon
Print_ISBN :
978-1-4577-0159-7
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2011.5992778