Phase transformation of programmed NiSi electrical fuse: Diffusion, agglomeration and thermal stability

Author

Park, Jongwoo ; Kang, Han-Byul ; Kim, Gun-Rae ; Kim, Min

Author_Institution

Syst. LSI Div., Samsung Electron., Yongin, South Korea

fYear

2011

fDate

4-7 July 2011

Firstpage

1

Lastpage

7

Abstract

An advanced CMOS technology process reliability qualification especially for the NiSi poly gated electrical fuse (eFuse) consists of electrical characterization, physical analyses and reliability evaluations. In this paper, insights are given on microstructural behaviors of the programmed NiSi poly gated eFuse induced by the high temperature storage (HTS) test. Both ex- and in-situ transmission electron microscopy (TEM) reveal that the improved post-resistance of the programmed eFuse is attributed to the low temperature growth of Ni₃Si₂ during HTS test at 250°C. In addition, the Ni agglomeration, the propensity of Ni₃Si₂ formation on the programmed eFuse with and without void appearance on the fuse link, is comprehensively investigated in conjunction with the eFuse reliability.

Keywords

CMOS integrated circuits; electric fuses; high-temperature electronics; integrated circuit reliability; nickel compounds; semiconductor storage; thermal stability; transmission electron microscopy; CMOS technology process reliability qualification; NiSi; agglomeration; diffusion; eFuse; electrical characterization; high temperature storage test; phase transformation; physical analyses; poly gated electrical fuse; reliability evaluations; temperature 250 C; thermal stability; transmission electron microscopy; Anodes; Fuses; Heating; High temperature superconductors; Nickel; Programming; Reliability; Ni agglomeration; TEM; eFuse; electromigration; phase transformation; resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits (IPFA), 2011 18th IEEE International Symposium on the

Conference_Location

Incheon

ISSN

1946-1542

Print_ISBN

978-1-4577-0159-7

Electronic_ISBN

1946-1542

Type

conf

DOI

10.1109/IPFA.2011.5992800

Filename

5992800