Title :
A 3456-element CCD sensor with serpentine shift registers
Author :
Onishi, Shotaro ; Wen, Di ; Reaves, D. ; Pendelton, J.
Author_Institution :
Fairchild CCD Imaging Div., Palo Alto, CA, USA
Abstract :
An image sensor incorporating a serpentine shift register structure that allows a 7μm pitch, using a 2-poly, 2-metal process, will be reported.
Keywords :
Charge coupled devices; Charge transfer; Clocks; Current measurement; Electrodes; Electrons; High-resolution imaging; Sensor phenomena and characterization; Shift registers; Switches;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1984 IEEE International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ISSCC.1984.1156590