On-Chip Millimeter-Wave Library Device - Scalable Wilkinson Power Divier/Combiner

On-chip millimeter wave Wilkinson power divider has been developed with the back end of line (BEOL) wiring and enabled as a library device in a 0.13 mum BiCMOS process design kit. The device layout and model are fully scalable, i.e. users can design a power divider at different frequencies or in different reference characteristic impedance systems by inputting the dimensions. Excellent model and hardware correlation has been observed up to 110 GHz. The measured results show that very good performance on-chip Wilkinson power dividers have been obtained in this technology, such as less than about 0.1 dB amplitude imbalance, about 0.8 dB of insertion loss with bandwidth of about 15% of the design frequency (defined at 15 dB return loss level) and about 20 dB of isolations. In addition, the device is the design rule check (DRC) clean and the layout versus schematic (LVS) enabled, which help to shorten the design cycle.