DocumentCode

2880239

Title

Computer simulation of metal Ion beam enhanced deposition of metallization for diamond film

Author

Guoqing, Li ; Wong, N.B. ; Tao, Zhang ; Lee, S-T. ; Zongxin, Mu

Author_Institution

Dalian University of Technology, P.R.China

Volume

2

fYear

1999

fDate

18-20 May 1999

Firstpage

471

Lastpage

473

Keywords

Adhesives; Computer simulation; Ion beams; Ion implantation; Metallization; Monte Carlo methods; Sputtering; Substrates; Tail; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Application of the Conversion Research Results for International Cooperation, 1999. SIBCONVERS '99. The Third International Symposium

Conference_Location

Tomsk, Russia

Print_ISBN

0-7803-5172-X

Type

conf

DOI

10.1109/SIBCON.1999.771712

Filename

771712