DocumentCode
2881449
Title
Laser crystallization for flat panel display
Author
Knowles, David ; Turk, Brandon ; Burfeindt, Bernd ; Brown, Shane
Author_Institution
TCZ Team Cymer Zeiss GmbH, San Diego, CA
fYear
2006
fDate
21-26 May 2006
Firstpage
1
Lastpage
1
Abstract
We will review the status of current laser based crystallization processes, and discuss the specifications and the critical design aspects of the laser and of the optical system developed for the TCZ production tool.
Keywords
crystallisation; flat panel displays; laser materials processing; optical design techniques; flat panel display; laser crystallization; optical system; Crystallization; Flat panel displays; Glass; Laser beams; Liquid crystal displays; Optical attenuators; Optical design; Optical films; Power lasers; Surface emitting lasers; (120.2040) Displays; (140.2180) Excimer Laser;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location
Long Beach, CA
Print_ISBN
978-1-55752-813-1
Electronic_ISBN
978-1-55752-813-1
Type
conf
DOI
10.1109/CLEO.2006.4628852
Filename
4628852
Link To Document