Analysis of the interaction of free and bound microplasmas

Author

Kim, Y.H. ; Sung, S.H. ; Lee, H.E. ; Park, S.-J. ; Eden, J.G.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA

fYear

2011

fDate

26-30 June 2011

Firstpage

1

Lastpage

1

Abstract

Summary form only given. Interactions between low temperature microplasmas bound to quasi-ellipsoidal cavities and free, columnar filaments produced by a parallel plate dielectric barrier discharge structure have been observed. The microplasma array comprises of two microcavities etched into the interior surfaces of two glass plates separated by 80 μm, each with a major axis of 700 ± 50 μm and a minor axis 230 ± 20 μm. Stable glow discharges were produced at Ne gas pressures of 300 - 760 Torr. Diffused and free columnar microplasmas that surrounded the microcavity plasma had a mean diameter of 136 ± 10 μm and separation (pitch) of 485 ± 60 μm, respectively. Optical images of free microplasmas interacting with two microcavities with ~700 μm diameter show microplasmas confined at the perimeters of the microcavities as well as between them along a bisecting line.

Keywords

diffusion; glow discharges; microcavities; neon; plasma confinement; plasma diagnostics; plasma instability; plasma interactions; plasma transport processes; Ne; bound microplasmas; diffused microplasmas; distance 80 mum; free columnar filaments; free columnar microplasmas; glass plates; low temperature microplasmas; microplasma array; microplasma interaction; optical images; parallel plate dielectric barrier discharge structure; pressure 300 torr to 760 torr; quasiellipsoidal cavities; size 210 mum to 750 mum; stable glow discharges;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science (ICOPS), 2011 Abstracts IEEE International Conference on

Conference_Location

Chicago, IL

ISSN

0730-9244

Print_ISBN

978-1-61284-330-8

Electronic_ISBN

0730-9244

Type

conf

DOI

10.1109/PLASMA.2011.5993073

Filename

5993073