Fluid control devices

Within an integrated programme on microengineering, the GEC Hirst Research Centre is developing design modelling, machining and bonding techniques for miniature fluid devices. Such devices are also the focus of a Brite EuRam project which covers a range of fabrication techniques and individual devices, with emphasis later in the project on interfacing and integration of devices into a complete system. This paper concentrates on the development of fabrication techniques which involve a combination of lithography and electroforming, using a thick dry film resist and ultraviolet exposure to provide a very much cheaper alternative to the widely publicised LIGA method. A number of device structures are described