Title :
Moving and flexible microstructures
Abstract :
Microengineering is developing at a rate limited by the enormous amount of practical difficulties encountered. Vibrating elements made of pure silicon offer stabilities approaching one part in a million. This work presents some basic research into the lubrication of silicon surfaces
Conference_Titel :
Moving and Flexing Microstructures - their Design, Modelling and Production, IEE Colloquium on
Conference_Location :
London
