Al/Al2O3 micro channel plasma chemical reactor for ozone synthesis

Summary form only given. Arrays of low temperature microplasma channels have been demonstrated for on-chip chemical synthesis in an atmospheric pressure gas environment. Plasma channels with widths of a 200-300 μm and lengths up to 50 mm have been generated on a flowing state basis in sealed microchannels fabricated by micropowder blasting and wet chemical process. The total effective plasma reaction volume in the current device design is 1~15 mm³.These channels are situated in a dielectric barrier structure having a buried electrode geometry fabricated on 125-250 μm thick Al foil and the microplasmas are sustained in air, O₂ and water vapor flows at atmospheric pressure. When the 6 individual channels were operated for O₃ synthesis, an ozone concentration of 3-15 mg/1 is produced with a 20 kHz sinusoidal voltage (RMS) of 2.5-3.2 kV and at a flow rate of feedstock gases of 0.1-1.5 L/min. The performance of the device in relation to electrode geometry, discharge volume and parallel operation of the array will be discussed.