Title :
Nanoscale imaging with coherent acoustic phonon pulses
Author :
Klein, J. ; Norris, T.B. ; Daly, B.C. ; Pau, S. ; Tennant, D.M. ; Taylor, J.A. ; Bower, J.E.
Author_Institution :
EECS Dept., Univ. of Michigan, Ann Arbor, MI
Abstract :
We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 mum features that is buried beneath an A1 film. Simulation results for higher resolution measurements are also described.
Keywords :
acoustic imaging; aluminium; high-speed optical techniques; nanotechnology; phonons; photoresists; Al; coherent acoustic phonon pulses; nanoscale imaging; photoresist pattern; Acoustic imaging; Acoustic pulses; Phonons; (110.7170) Ultrasound; (320.7150) Ultrafast Spectroscopy;
Conference_Titel :
Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
Conference_Location :
Long Beach, CA
Print_ISBN :
978-1-55752-813-1
Electronic_ISBN :
978-1-55752-813-1
DOI :
10.1109/CLEO.2006.4628910
