• DocumentCode
    2882402
  • Title

    Nanoscale imaging with coherent acoustic phonon pulses

  • Author

    Klein, J. ; Norris, T.B. ; Daly, B.C. ; Pau, S. ; Tennant, D.M. ; Taylor, J.A. ; Bower, J.E.

  • Author_Institution
    EECS Dept., Univ. of Michigan, Ann Arbor, MI
  • fYear
    2006
  • fDate
    21-26 May 2006
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 mum features that is buried beneath an A1 film. Simulation results for higher resolution measurements are also described.
  • Keywords
    acoustic imaging; aluminium; high-speed optical techniques; nanotechnology; phonons; photoresists; Al; coherent acoustic phonon pulses; nanoscale imaging; photoresist pattern; Acoustic imaging; Acoustic pulses; Phonons; (110.7170) Ultrasound; (320.7150) Ultrafast Spectroscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2006 and 2006 Quantum Electronics and Laser Science Conference. CLEO/QELS 2006. Conference on
  • Conference_Location
    Long Beach, CA
  • Print_ISBN
    978-1-55752-813-1
  • Electronic_ISBN
    978-1-55752-813-1
  • Type

    conf

  • DOI
    10.1109/CLEO.2006.4628910
  • Filename
    4628910
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2882402