Field emission properties of nano-layered carbon lateral edge emitters

Author

Kumar, N. ; Hellmer, R. ; Mueller, M. ; Eaton, M. ; Browning, J.

Author_Institution

Stellar Micro Devices, Inc., Austin, TX, USA

fYear

2011

fDate

26-30 June 2011

Firstpage

1

Lastpage

1

Abstract

Summary form only given. In this presentation, field emission properties of nano layered carbon (NLC) lateral edge emitters will be presented. During this study, the diamond like carbon films were fabricated with pulse laser deposition process using a 1.8 joule Q-switched Nd:YAG laser. The number of nano layers was varied from 4 to 16. The thickness was varied from 2.5nm to 10nm. These NLC emitter layers were patterned into triode edge emitters using standard photolithography process and their field emission properties were studied under high vacuum conditions. Identical emitters were fabricated on substrates of different thermal conductivities to study the thermal heating effects. Under optimum conditions, single tip currents as high as 200 micro-amps have been measured.

Keywords

diamond-like carbon; field emission; nanolithography; nanostructured materials; photolithography; pulsed laser deposition; thin films; C; NLC emitter layers; Q-switched Nd:YAG laser; current 200 muA; diamond like carbon films; energy 1.8 J; field emission properties; high vacuum conditions; nanolayered carbon lateral edge emitters; photolithography process; pulse laser deposition process; single tip currents; size 2.5 nm to 10 nm; thermal conductivities; thermal heating effects; triode edge emitters; Carbon dioxide; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science (ICOPS), 2011 Abstracts IEEE International Conference on

Conference_Location

Chicago, IL

ISSN

0730-9244

Print_ISBN

978-1-61284-330-8

Electronic_ISBN

0730-9244

Type

conf

DOI

10.1109/PLASMA.2011.5993136

Filename

5993136