DocumentCode
2882694
Title
Integrated optics on silicon for sensor applications
Author
Cristea, Dana ; Caldararu, Mira ; Paraschiv, Anca ; Craciunoiu, Florea
Author_Institution
Nat. Inst. for Res. & Dev. of Microtechnol., Bucharest, Romania
Volume
2
fYear
1998
fDate
18-20 May 1998
Firstpage
1444
Abstract
This paper presents our research in the field of integrated optics. We integrated on the same silicon chip different components (photodetectors, waveguides, couplers, interferometers, transducing layers) and realized chemo-optical sensors on one silicon chip
Keywords
chemical sensors; integrated optics; integrated optoelectronics; light interferometers; optical couplers; optical waveguides; photodetectors; silicon; Si; chemo-optical sensors; couplers; integrated optics; interferometers; optical sensor applications; photodetectors; silicon; silicon chip; transducing layers; waveguides; Couplers; Electromagnetic waveguides; Integrated optics; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Optical waveguides; Photodetectors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrotechnical Conference, 1998. MELECON 98., 9th Mediterranean
Conference_Location
Tel-Aviv
Print_ISBN
0-7803-3879-0
Type
conf
DOI
10.1109/MELCON.1998.699477
Filename
699477
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