One dimensional modeling of atomic and molecular species in dc and rf ion sources

A 1d analytical model of magnetically confined plasma in an ion source is described. The model is based on the plasma fluid transport equations using the concepts of mobility and conduction and the gradients of potential, density and temperature. The model describes the flux of thermal electrons and fast ionizing electrons in dc arc and rf driven ion sources and includes ionization, gas heating and dissociation and the impact of coulomb collisions which become dominant in intense discharges. The model provides the flux and density of atomic and molecular ions, neutral atoms and negative ions simultaneously. It also includes aspects of source design such as size, confinement efficiency and application of a weak magnetic field to the plasma flow.