• DocumentCode
    2883074
  • Title

    System applications and limitations of submicron MOS

  • Author

    Mack, I. ; Gaensslen, F.

  • Author_Institution
    Naval Research Laboratory, Washington, DC, USA
  • Volume
    XXVIII
  • fYear
    1985
  • fDate
    13-15 Feb. 1985
  • Firstpage
    114
  • Lastpage
    115
  • Abstract
    MOS technology has progressed to where 1μ design rules can be supported. However, a question arises as to the appropriate effort which sould be applied to submicron MOS technology at this time to achieve the projected 20-30 times increase in device density and concomitant increase in system performance. The process, device and system implications of pursuing submicron MOS technology will be discussed.
  • Keywords
    Clocks; Educational institutions; Fabrication; Industrial economics; Integrated circuit interconnections; Integrated circuit technology; Lithography; Microcomputers; Packaging; Signal design;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference. Digest of Technical Papers. 1985 IEEE International
  • Conference_Location
    New York, NY, USA
  • Type

    conf

  • DOI
    10.1109/ISSCC.1985.1156848
  • Filename
    1156848
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2883074