Fabrication of photoresist-based polymer resonator antennas using ultra-thick SU-8 based dry films

The purpose of this paper is to demonstrate fabrication of various photoresist-based polymer resonator antenna structures using ultra-thick SU-8 based dry films. First, a set of dielectric resonator antenna geometries with modified shapes was designed and included in an X-ray mask. Then the ultra-thick dry films were exposed through this mask to construct antennas. 2 mm tall structures with fine features down to 50 μm are achieved. The preliminary results show the existence of new modes in modified shapes which can be utilized for future antenna applications. Over 90% optically transparency makes these SU-8 based structures highly attractive for transparent antenna applications.