Title :
Adhesion´s macroscopic exhibition of CVD diamond films on Si substrate and its relationship with film´s microstructure
Author :
Ma, Wei ; Yu, Jilin ; Zhou, Haiyang ; Zhu, Xiaodong ; Zhan, Rujuan
Author_Institution :
Dept. of Modern Mech., Univ. of Sci. & Technol. of China, Hefei, China
Abstract :
The adhesion force of a CVD diamond film on a Si substrate was detected by direct tensile tests. The test was performed on a tensile testing rig equipped with a S570 scanning electronic microscope, and the whole testing process (load-strain curve) was recorded. By means of Raman spectrum analysis and SEM photography, the relationship between the microstructure of the diamond film and the macro-exhibition of the adhesion force is found and a reasonable explanation of this phenomenon is given
Keywords :
Raman spectra; adhesion; chemical vapour deposition; diamond; elemental semiconductors; scanning electron microscopy; semiconductor thin films; tensile testing; C-Si; CVD diamond films; Raman spectrum analysis; S570 scanning electronic microscope; SEM photography; Si; Si substrate; adhesion; adhesion force; diamond film microstructure; direct tensile tests; film microstructure; load-strain curve; tensile testing rig; testing process; Acoustic testing; Adhesives; Bars; Chemical vapor deposition; Electronic equipment testing; Microstructure; Optical films; Scanning electron microscopy; Semiconductor films; Substrates;
Conference_Titel :
Electronic Materials and Packaging, 2000. (EMAP 2000). International Symposium on
Conference_Location :
Hong Kong
Print_ISBN :
0-7803-6654-9
DOI :
10.1109/EMAP.2000.904187
