Title :
Study of low-frequency excess noise in RTA annealed n-type gallium nitride
Author :
Zhu, C.F. ; Fong, W.K. ; Leung, B.H. ; Cheng, C.C. ; Surya, C.
Author_Institution :
Dept. of Electron. & Inf. Eng., Hong Kong Polytech. Univ., China
Abstract :
Low-frequency noise is investigated in n-type GaN film grown by rf-plasma assisted molecular beam epitaxy. The temperature dependence of the voltage noise power spectra, Sv(f), was examined from 400 K to 80 K in the frequency range between 30 Hz and 100 kHz, which can be modeled as the superposition of 1/f (flicker) noise and G-R noise. At f>500 Hz the noise is dominated by G-R noise with activation energies of 360 meV and 65 meV from the conduct band. The results clearly demonstrate the trap origin for both the 1/f noise and G-R noise. At the low-frequency range the fluctuation was dominated by 1/f noise. To determine the origin of the noise we considered both the bulk mobility fluctuation and the trap fluctuation models. Our experimental results showed that rapid thermal annealing (RTA) at 800°C resulted in over one order of magnitude decrease in the Hooge parameter. Annealing at temperatures in excess of 1000°C resulted in significant increase in the noise. Photoluminescence and X-ray diffraction measurements also showed that the crystallinity of the films improved with RTA at 800°C with an accompanying reduction in deep levels. Annealing at 900°C and 1000°C resulted in an increase in the FWHM of the X-ray diffraction indicative of thermal decomposition of the materials. The results are in excellent agreement with the trend of Hooge parameters as a function of annealing temperature, strongly indicating trap origin of the observed 1/f noise
Keywords :
1/f noise; III-V semiconductors; X-ray diffraction; carrier mobility; deep levels; flicker noise; gallium compounds; molecular beam epitaxial growth; photoluminescence; rapid thermal annealing; semiconductor epitaxial layers; semiconductor growth; 1/f noise; 30 Hz to 100 kHz; 360 meV; 400 to 800 K; 65 meV; 800 to 1000 degC; GaN; Hooge parameter; III-V semiconductors; RTA; X-ray diffraction measurements; activation energies; annealing temperature; bulk mobility fluctuation; deep levels; flicker noise; low-frequency excess noise; photoluminescence; rf-plasma assisted molecular beam epitaxy; temperature dependence; thermal decomposition; trap fluctuation models; voltage noise power spectra; 1f noise; Fluctuations; Frequency; Gallium nitride; Low-frequency noise; Molecular beam epitaxial growth; Rapid thermal annealing; Temperature dependence; Voltage; X-ray diffraction;
Conference_Titel :
Electron Devices Meeting, 2000. Proceedings. 2000 IEEE Hong Kong
Conference_Location :
Hong Kong
Print_ISBN :
0-7803-6304-3
DOI :
10.1109/HKEDM.2000.904208