Title :
Design and modeling of a piezo-actuated positioning mechanism
Author :
Adriaens, J.M.T.A. ; De Koning, W.L. ; Banning, R.
Author_Institution :
Dept. of Appl, Math. & Comput. Sci., Delft Univ. of Technol., Netherlands
Abstract :
We are involved in the design and control of a 1-dimensional positioning mechanism for a range of 50 μm and an accuracy of 30 pm. Only piezoelectric actuators can be used to manage such small displacements. However, these actuators show hysteretic behavior and lengthening saturation. The extremely small displacements are measured by means of capacitive sensors. In order to design a controller a model of the positioning mechanism and the actuators is developed. Contrary to the existing literature, in our model the hysteresis is described by a differential equation. The mechanical characteristics of the design, and therefore also of the model, are chosen such that they are practically realizable and advantageous for controller design. The final nonlinear fifth order state space model is believed to be suitable for a nonlinear control technique like feedback linearization
Keywords :
capacitors; control system synthesis; differential equations; electric sensing devices; nonlinear control systems; piezoelectric actuators; position control; state-space methods; 1D positioning mechanism; 50 mum; capacitive sensors; controller design; differential equation; feedback linearization; hysteresis; lengthening saturation; mechanical characteristics; nonlinear control technique; nonlinear fifth order state space model; piezo-actuated positioning mechanism; piezoelectric actuators; Actuators; Computer science; Differential equations; History; Magnetic hysteresis; Magnetic materials; Mathematics; Microelectronics; Physics; Sensor phenomena and characterization;
Conference_Titel :
Decision and Control, 1997., Proceedings of the 36th IEEE Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-4187-2
DOI :
10.1109/CDC.1997.657891
