Title :
Synthesis of nanoparticles using an atmospheric pressure plasma jet
Author :
Chang, S.M. ; Hsu, C.C.
Author_Institution :
Dept. of Chem. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
Summary form only given. Nanocrystalline metal oxide particles are synthesized by an atmospheric pressure plasma jet (APPJ). The APPJ is sustained using a repetitive pulse source with O2 and N2 as the plasma gas. Precursors of several types are used to synthesize simple and complex metal oxides via multiple approaches to assess the potential using such a process to fabricate nanoparticles. The first approach uses Zn(NO3)2 and NaNO3 solution to fabricate ZnO nanoparticles using the salt-assisted spray pyrolysis-like process. The ultrasonically nebulized precursor is carried into the downstream of the APPJ using a carrier gas. This process is able to fabricate nanocrystalline ZnO particles within a short contact time (a few ms) between the precursor and the plasma jet. When N2 plasma is used, N-doped ZnO is formed and the doping level can be controlled using the plasma gas flow rate. The second approach utilizes nebulized the LiNO3 and Titanium bis(ammonium lactate)-dehydroxide solution as the precursor to fabricate Li4Ti5O12 using O2 and N2 plasmas. The fabricated powders include Li4Ti5O12. TiO2, and Li2TiO3. The third approach uses titanium tetraisopropoxide as the precursor. The precursor is injected into the system using a heated bubbler. With this approach, nearly mono-dispersed N-doped TiO2 nanoparticles are synthesized using N2 plasmas. Preliminary studies show that the first approach is the most stable process while the approach using organic metal precursors exhibits the highest throughput. In this presentation, key features of different approaches and key factors that dominate the fabricated nanoparticle characteristics will be discussed.
Keywords :
II-VI semiconductors; nanofabrication; nanoparticles; nitrogen; plasma jets; plasma materials processing; pyrolysis; semiconductor doping; semiconductor growth; spraying; zinc compounds; ZnO:N; atmospheric pressure plasma jet; complex metal oxides; doping level; heated bubbler; monodispersed nanoparticles; nanocrystalline metal oxide particles; organic metal precursors; plasma gas; plasma gas flow rate; repetitive pulse source; salt-assisted spray pyrolysis-like process; titanium bis(ammonium lactate)-dehydroxide solution; titanium tetraisopropoxide; ultrasonically nebulized precursor; Heating; Plasmas; Titanium;
Conference_Titel :
Plasma Science (ICOPS), 2011 Abstracts IEEE International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
978-1-61284-330-8
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2011.5993274