DocumentCode

2884816

Title

Writing Nanostructures with a Helium Beam

Author

Nowak, Sophie ; Pfau, Timo ; Mlynek, Jaroslav

fYear

1996

fDate

8-13 Sept. 1996

Firstpage

238

Lastpage

238

Keywords

Cameras; Energy resolution; Gold; Helium; Lithography; Metastasis; Nanofabrication; Nanostructures; Resists; Writing;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-optics Europe, 1996. CLEO/Europe., Conference on

Conference_Location

Hamburg, Germany

Print_ISBN

0-7803-3169-9

Type

conf

DOI

10.1109/CLEOE.1996.562399

Filename

562399