DocumentCode
2885336
Title
Research of possibility of reception low dimensional systems with use of the phenomenon of self-organizing of the carbon adsorbate on monocrystal silicon
Author
Shatunov, D.A. ; Shanigin, V.Y. ; Yafarov, R.K.
Author_Institution
Saratov State Univ. in the name of N.G. Chernyshevskiy, Saratov, Russia
fYear
2010
fDate
22-23 Sept. 2010
Firstpage
60
Lastpage
65
Abstract
Possibility of use of the self-organizing sub monolayer carbon masks for formation of nanodimensional structures is shown. Determined that reception of regular silicon nanosystems in the form of columnar structures of the nanometer sizes with use of sub monolayer carbon masks is more effectively carried out the sizes at use of silicon of orientation (100).
Keywords
adsorbed layers; carbon; elemental semiconductors; monolayers; nanofabrication; nanostructured materials; self-assembly; silicon; C; Si; carbon adsorbate; columnar structure; nanodimensional structure; regular monocrystal silicon nanosystem; self-organizing submonolayer carbon masks; silicon orientation (100); Carbon; Electronic mail; Nanostructures; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on
Conference_Location
Saratov
Print_ISBN
978-1-4244-6954-3
Type
conf
DOI
10.1109/APEDE.2010.5624020
Filename
5624020
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