DocumentCode :
2885336
Title :
Research of possibility of reception low dimensional systems with use of the phenomenon of self-organizing of the carbon adsorbate on monocrystal silicon
Author :
Shatunov, D.A. ; Shanigin, V.Y. ; Yafarov, R.K.
Author_Institution :
Saratov State Univ. in the name of N.G. Chernyshevskiy, Saratov, Russia
fYear :
2010
fDate :
22-23 Sept. 2010
Firstpage :
60
Lastpage :
65
Abstract :
Possibility of use of the self-organizing sub monolayer carbon masks for formation of nanodimensional structures is shown. Determined that reception of regular silicon nanosystems in the form of columnar structures of the nanometer sizes with use of sub monolayer carbon masks is more effectively carried out the sizes at use of silicon of orientation (100).
Keywords :
adsorbed layers; carbon; elemental semiconductors; monolayers; nanofabrication; nanostructured materials; self-assembly; silicon; C; Si; carbon adsorbate; columnar structure; nanodimensional structure; regular monocrystal silicon nanosystem; self-organizing submonolayer carbon masks; silicon orientation (100); Carbon; Electronic mail; Nanostructures; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on
Conference_Location :
Saratov
Print_ISBN :
978-1-4244-6954-3
Type :
conf
DOI :
10.1109/APEDE.2010.5624020
Filename :
5624020
Link To Document :
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