• DocumentCode
    2885591
  • Title

    Investigation of nanolayers´ properties generated on Si surface in H2O

  • Author

    Bilenko, D.I. ; Belobrovaya, O.Ya. ; Malyar, I.V. ; Mel´nikova, T.E. ; Mysenko, I.B. ; Polyanskaya, V.P. ; Terin, D.V.

  • Author_Institution
    Saratov State Univ., Saratov, Russia
  • fYear
    2010
  • fDate
    22-23 Sept. 2010
  • Firstpage
    145
  • Lastpage
    146
  • Abstract
    This article deals with investigation of nanolayers´ properties generated on Si surface in H2O.
  • Keywords
    nanofabrication; nanostructured materials; H2O; Si; nanolayers; Electronic mail; Silicon; Water;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on
  • Conference_Location
    Saratov
  • Print_ISBN
    978-1-4244-6954-3
  • Type

    conf

  • DOI
    10.1109/APEDE.2010.5624036
  • Filename
    5624036
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2885591