Title :
A Systematic Approach to Accurate Evaluation of CD-Metrology Tools
Author :
Orji, Ndubuisi G. ; Bunday, Benjamin D. ; Dixson, Ronald G. ; Allgair, John A.
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg
Abstract :
We present a procedure for evaluating the accuracy and performance of critical dimension (CD) metrology tools used in monitoring the semiconductor manufacturing process. Our method involves a reference measurement instrument and SI traceable reference material to evaluate the accuracy and resolution of CD metrology tools. The achievable accuracy and intrinsic linearity of the tools under test are evaluated with respect to the reference system.
Keywords :
integrated circuit manufacture; measurement systems; measurement uncertainty; SI traceable reference material; accuracy evaluation; atomic force microscope; critical dimension metrology tools; intrinsic linearity; performance evaluation; reference measurement instrument; scanning electron microscope; semiconductor manufacturing process monitoring; tools resolution; Atomic force microscopy; Instruments; Manufacturing processes; Metrology; Microelectronics; Optical scattering; Radar measurements; Scanning electron microscopy; Semiconductor device manufacture; System testing; Accuracy; Atomic force microscope; Critical dimension; Scanning electron microscope; Uncertainty;
Conference_Titel :
Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
1-4244-0781-8
Electronic_ISBN :
1-4244-0781-8
DOI :
10.1109/ICMTS.2007.374446
