Title :
The rectangular bipolar transistor tetrode structure and its application
Author :
Schroter, M. ; Lehmann, S.
Author_Institution :
Univ. of California at San Diego, La Jolla
Abstract :
The operation of rectangular-shaped bipolar tetrode structures as well as the proper evaluation of measured data from such structures are discussed. Based on device simulation, which also serves for verification purposes, guidelines for the layout and for measurement data correction are presented. The application to experimental data is demonstrated.
Keywords :
bipolar transistors; semiconductor device models; tetrodes; device simulation; measurement data correction; rectangular bipolar transistor tetrode structure; Bipolar transistors; Electrical resistance measurement; Geometry; Integrated circuit measurements; Monitoring; Process control; Radio frequency; Solid modeling; Testing; Voltage;
Conference_Titel :
Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on
Conference_Location :
Tokyo
Print_ISBN :
1-4244-0781-8
Electronic_ISBN :
1-4244-0781-8
DOI :
10.1109/ICMTS.2007.374484
