Coupling on-wafer measurement errors and their impact on calibration and de-embedding up to 110 GHz for CMOS millimeter wave characterizations

Author

Andrei, C. ; Gloria, D. ; Danneville, F. ; Scheer, P. ; Dambrine, G.

Author_Institution

Inst.. d´´Electron., de Microelectron. et de Nanotechnol., Villeneuve-d´´Ascqz

fYear

2007

fDate

19-22 March 2007

Firstpage

253

Lastpage

256

Abstract

An investigation of parasitic coupling that occurs when making on-wafer measurement at millimeter wave range is described. Several passive structures-dedicated to de-embedding of MOSFETs-are experimentally studied and compared to HFSS electromagnetic simulations in order to highlight parasitic coupling and identify causes of measurement errors. Suggestions on coupling between adjacent test structures and/or probe to back-end environment are also discussed.

Keywords

CMOS integrated circuits; MIMIC; MOSFET; calibration; integrated circuit measurement; integrated circuit testing; measurement errors; CMOS millimeter wave characterizations; HFSS electromagnetic simulation; MOSFET de-embedding; S-parameter measurements; electromagnetic coupling; on-wafer calibration; on-wafer measurement errors; parasitic coupling; test structure design; CMOS technology; Calibration; Frequency; Measurement errors; Millimeter wave measurements; Millimeter wave radar; Millimeter wave technology; Probes; Silicon; Testing; On-wafer calibration; S-parameter measurements; electromagnetic coupling; test structure design;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures, 2007. ICMTS '07. IEEE International Conference on

Conference_Location

Tokyo

Print_ISBN

1-4244-0781-8

Electronic_ISBN

1-4244-0781-8

Type

conf

DOI

10.1109/ICMTS.2007.374494

Filename

4252444