Title :
Novel temperature/humidity-sensitive multilayer thick-film structures for integrated sensors application
Author :
Klym, H.I. ; Hadzaman, I.V. ; Shpotyuk, O.I.
Author_Institution :
Sci. Res. Co. Carat, Lviv, Ukraine
Abstract :
Temperature and humidity-sensitive thick-film structures based on spinel semiconducting ceramics different chemical composition (Cu0.1Ni0.1Co1.6Mn1.2O4 and Cu0.1Ni0.8Co0.2Mn1.9O4) and dielectric magnesium aluminate MgAl2O4 ceramics were fabricated and studied. These elements are shown to be successfully applied for integrated temperature/humidity sensors of environmental monitoring and control.
Keywords :
ceramics; cobalt compounds; copper compounds; dielectric materials; humidity sensors; magnesium compounds; monitoring; nickel compounds; semiconductor materials; temperature sensors; thick film sensors; dielectric magnesium aluminate ceramics; environmental monitoring; humidity sensor; integrated sensors; semiconducting ceramics; temperature sensor; thick film structures; Ceramics; Humidity; Temperature measurement; Temperature sensors; Thermistors; Thick films;
Conference_Titel :
Laser and Fiber-Optical Networks Modeling (LFNM), 2010 10th International Conference on
Conference_Location :
Sevastopol
Print_ISBN :
978-1-4244-6994-9
DOI :
10.1109/LFNM.2010.5624217