DocumentCode
2889720
Title
A CMOS-Based Capacitive Sensor for Laboratory-On-Chips: Design and Experimental Results
Author
Ghafar-Zadeh, Ebrahim ; Sawan, Mohamad
Author_Institution
Dept. of Electr. Eng., Ecole Polytechnique de Montreal, Que.
fYear
2007
fDate
27-30 May 2007
Firstpage
85
Lastpage
88
Abstract
In this paper, we present a charge-based interface circuit to detect minute capacitance changes for laboratory-on-chip applications. The interface circuits and sensing electrodes are implemented in 0.18 mum CMOS process. We describe the circuit design and then put forward simulation results. We also demonstrate and discuss the measurement results of fabricated capacitive sensor. These measurements reveal a high precision detection of sensing capacitance as less as 1 fF.
Keywords
CMOS image sensors; capacitance measurement; capacitive sensors; lab-on-a-chip; 0.18 micron; CMOS process; CMOS-based capacitive sensor; capacitance measurement; charge-based interface circuit; laboratory-on-chips; CMOS process; Capacitance measurement; Capacitive sensors; Circuits; Electrodes; Equations; Lab-on-a-chip; Laboratories; Pulsed power supplies; Semiconductor device measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2007. ISCAS 2007. IEEE International Symposium on
Conference_Location
New Orleans, LA
Print_ISBN
1-4244-0920-9
Electronic_ISBN
1-4244-0921-7
Type
conf
DOI
10.1109/ISCAS.2007.378188
Filename
4252577
Link To Document