Characterization of the manufacturing worthiness of semiconductor process equipment

In order to achieve world-class competitive manufacturing capability, the concept of supplier partnerships was developed, with a win-win approach. Total equipment performance, which included process and manufacturing capability, strong vendor relationships, vendor contract maintenance, training, field service support, and continuous improvement methodology, was emphasized. An off-site, nonproduction facility was set up to help develop manufacturable solutions. The equipment set was exercised in the facility to simulate a volume production environment. The purpose of the exercise was to prove that the equipment can meet the intended need. Process and hardware capability of the equipment set was evaluated and documented over a large wafer volume. The result of this methodology was qualified production at high volume