Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy

In this paper, we explore the use of an adaptive electrical calibration strategy in the context of design-for-manufacturing for MEMS convective accelerometers. The calibration principle relies on the adjustment of the heater power level such that sensitivity is set to a given target value. The idea is to define multiple sensitivity targets in order to improve production yield and to insert a criterion on power consumption. Different device binning can then be achieved depending on test limit settings. Results obtained from Monte-Carlo simulation are presented to demonstrate potentialities of the technique.