Fabrication and optical characterization of ultra-thin anodic aluminum oxide nanoporous templates

Author

Kuan-Yu Hsiao ; Wen-Jeng Ho ; Po-Yueh Cheng ; Chien-Wu Yeh ; Ruei-Siang Sue ; Yu-Tang Shen ; Chia-Hua Hu ; Yu-Jie Deng

Author_Institution

Dept. of Electro-Opt. Eng., Nat. Taipei Univ. of Technol., Taipei, Taiwan

fYear

2015

fDate

4-6 May 2015

Firstpage

1

Lastpage

3

Abstract

In this study, the fabrication of thin porous anodic aluminum oxide (AAO) templates with controllable thickness of 400-1300 nm is demonstrated. One-step anodizing method is used to generate AAO template with hexagonal porous distributed profile. The pore diameter pore-widening and AAO barrier layer thinned down are investigated. The morphologies and pore structures of the fabricated AAO templates are characterized using FE-SEM images and the transmittance and reflective spectra.

Keywords

aluminium compounds; anodisation; field emission electron microscopy; nanoporous materials; scanning electron microscopy; AAO templates; Al_xO_y; FE-SEM images; controllable thickness; one step anodizing method; optical characterization; pore diameter pore widening; pore structure; reflective spectra; size 400 nm to 1300 nm; transmittance spectra; ultrathin anodic aluminum oxide nanoporous templates; Aluminum oxide; Etching; Fabrication; Films; Scanning electron microscopy; Silicon; Anodic aluminum oxide (AAO); anodizing; pore-widening;

fLanguage

English

Publisher

ieee

Conference_Titel

Next-Generation Electronics (ISNE), 2015 International Symposium on

Conference_Location

Taipei

Type

conf

DOI

10.1109/ISNE.2015.7132018

Filename

7132018