Investigation of interactions between plasmas and RF-diagnostics: Challenges of complex 3D-electromagnetic field simulations

3D-electromagnetic field simulations are an indispensable tool for a cost-effective development and characterization of novel radio frequency systems for plasma diagnostic. This contribution investigates the challenges, simulations have to cope with for a realistic modeling of interactions between probe and plasma. Using the Drude model, a plasma can be described as a dielectric material by its plasma electron frequency and collision frequency. This yields numerous variations of modeled plasmas, showing the resulting interaction processes. A comparison of simulation and measurement shows an excellent agreement, demonstrating the suitability of the presented simulation model.