Validated simulation models for factory control

Author

Atherton, Robert W. ; Pool, Mark A. ; Mukherjee, Sandeep ; Hodgman, Rick

Author_Institution

In-Motion Technol., Mountain View, CA, USA

fYear

1989

fDate

22-24 May 1989

Firstpage

118

Lastpage

122

Abstract

The authors describe the use of the ACHILLES simulation model in the wafer fabrication facility of Silicon Systems Inc. at Tustin, California. The accuracy of the model results from initialization, calibration, and validation procedures. The validated model was used to reduce by one-half the cycle time of a major process in a multiprocess operating environment. The validation procedure enhances installed CAM (computer-aided manufacturing) systems by improving the accuracy and value of operation information in the CAM database

Keywords

CAD/CAM; digital simulation; integrated circuit manufacture; manufacturing computer control; manufacturing data processing; semiconductor device manufacture; ACHILLES; CAM database; CAM system enhancement; Silicon Systems; calibration; computer-aided manufacturing; factory control; initialization; multiprocess operating environment; operation information; simulation model; validation procedures; wafer fabrication facility; CADCAM; CMOS technology; Calibration; Computer aided manufacturing; Databases; Electrical equipment industry; Fabrication; Production facilities; Semiconductor device modeling; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Science Symposium, 1989. ISMSS 1989., IEEE/SEMI International

Conference_Location

Burlingame, CA

Type

conf

DOI

10.1109/ISMSS.1989.77259

Filename

77259