Title :
Validated simulation models for factory control
Author :
Atherton, Robert W. ; Pool, Mark A. ; Mukherjee, Sandeep ; Hodgman, Rick
Author_Institution :
In-Motion Technol., Mountain View, CA, USA
Abstract :
The authors describe the use of the ACHILLES simulation model in the wafer fabrication facility of Silicon Systems Inc. at Tustin, California. The accuracy of the model results from initialization, calibration, and validation procedures. The validated model was used to reduce by one-half the cycle time of a major process in a multiprocess operating environment. The validation procedure enhances installed CAM (computer-aided manufacturing) systems by improving the accuracy and value of operation information in the CAM database
Keywords :
CAD/CAM; digital simulation; integrated circuit manufacture; manufacturing computer control; manufacturing data processing; semiconductor device manufacture; ACHILLES; CAM database; CAM system enhancement; Silicon Systems; calibration; computer-aided manufacturing; factory control; initialization; multiprocess operating environment; operation information; simulation model; validation procedures; wafer fabrication facility; CADCAM; CMOS technology; Calibration; Computer aided manufacturing; Databases; Electrical equipment industry; Fabrication; Production facilities; Semiconductor device modeling; Silicon;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1989. ISMSS 1989., IEEE/SEMI International
Conference_Location :
Burlingame, CA
DOI :
10.1109/ISMSS.1989.77259
