Title :
Analysis of parallel beam gyroscope
Author :
Sato, Hiroshi ; Fukuda, Toshio ; Arai, Fumihito ; Iwata, Hitoshi ; Otoigawa, K.
Author_Institution :
Dept. of Micro Syst. Eng., Nagoya Univ., Japan
Abstract :
A parallel beam structure has many significant features, as follows: (i) the tip moves in parallel at the end; (ii) this structure converts a small displacement into a large strain; and (iii) when piling up this structure, each unit doesn´t interfere with the other units. We used this structure for a piezoelectric vibrating gyroscope (angular rate sensor), and detected angular rate using this gyroscope. In the paper, we analyze features of the parallel beam structure by the finite element method. We show that the resonance frequency of the drive unit and sensor unit can be easily adjusted by changing the mass at the tip. From this result, this structure suits the gyroscope
Keywords :
Coriolis force; angular measurement; finite element analysis; gyroscopes; piezoelectric actuators; piezoelectric transducers; PZT; PbZrO3TiO3; angular rate sensor; parallel beam gyroscope; parallel beam structure; piezoelectric vibrating gyroscope; resonance frequency; Capacitive sensors; Compressive stress; Costs; Electrical equipment industry; Finite element methods; Force sensors; Frequency; Gyroscopes; Sensor systems and applications; Tensile stress;
Conference_Titel :
Robotics and Automation, 1999. Proceedings. 1999 IEEE International Conference on
Conference_Location :
Detroit, MI
Print_ISBN :
0-7803-5180-0
DOI :
10.1109/ROBOT.1999.772593