Title :
Microminiaturization developments
Author :
Moellenstedt, G. ; Speidel, R.
Author_Institution :
University of Tübingen, Tübingen, West Germany
Keywords :
Absorption; Apertures; Conductivity; Copper; Electron beams; Gratings; Hydrocarbons; Magnetic films; Probes; Writing;
Conference_Titel :
Solid-State Circuits Conference. Digest of Technical Papers. 1961 IEEE International
Conference_Location :
Philadelphia, PA, USA
DOI :
10.1109/ISSCC.1961.1157323
