Title :
IEEE/SEMI International Semiconductor Manufacturing Science Symposium. Theme: ´Semiconductor Manufacturing´. ISMSS ´89 Proceedings (Cat. No.89CH2699-7)
Abstract :
The following topics were dealt with: IC manufacturing; organisation; training people; manufacturing management; quality control; process control; defect control; equipment maintenance; manufacturing worthiness; factory modelling; and expert systems
Keywords :
integrated circuit manufacture; maintenance engineering; management; process control; quality control; training; IC manufacturing; defect control; equipment maintenance; expert systems; factory modelling; manufacturing management; manufacturing worthiness; organisation; process control; quality control; training people;
Conference_Titel :
Semiconductor Manufacturing Science Symposium, 1989. ISMSS 1989., IEEE/SEMI International
Conference_Location :
Burlingame, CA, USA
DOI :
10.1109/ISMSS.1989.77262
