Title :
980-nm DBR lasers using higher order gratings fabricated in a single-step process
Author :
Fricke, J. ; Wenzel, H. ; Matalla, M. ; Klehr, A. ; Erbert, G.
Author_Institution :
Ferdinand-Braun-Inst. fur Hochsfrequenstech., Berlin, Germany
Abstract :
Single-longitudinal mode emission from two-section RW DBR diode lasers having 6th and 7th order gratings will be reported. Grating and RW have been simultaneously defined and fabricated using wafer stepper lithography and reactive ion etching, respectively.
Keywords :
diffraction gratings; distributed Bragg reflector lasers; laser modes; photolithography; ridge waveguides; semiconductor lasers; sputter etching; waveguide lasers; 980 nm; DBR laser; diode laser; grating fabrication; higher order grating; reactive ion etching; ridge waveguide; seventh order grating; single-longitudinal mode emission; single-step process; sixth order grating; wafer stepper lithography; Bragg gratings; Diode lasers; Distributed Bragg reflectors; Epitaxial growth; Etching; Laser modes; Lithography; Optical device fabrication; Semiconductor lasers; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN :
0-7803-8974-3
DOI :
10.1109/CLEOE.2005.1567889
