DocumentCode
2894650
Title
980-nm DBR lasers using higher order gratings fabricated in a single-step process
Author
Fricke, J. ; Wenzel, H. ; Matalla, M. ; Klehr, A. ; Erbert, G.
Author_Institution
Ferdinand-Braun-Inst. fur Hochsfrequenstech., Berlin, Germany
fYear
2005
fDate
12-17 June 2005
Firstpage
101
Abstract
Single-longitudinal mode emission from two-section RW DBR diode lasers having 6th and 7th order gratings will be reported. Grating and RW have been simultaneously defined and fabricated using wafer stepper lithography and reactive ion etching, respectively.
Keywords
diffraction gratings; distributed Bragg reflector lasers; laser modes; photolithography; ridge waveguides; semiconductor lasers; sputter etching; waveguide lasers; 980 nm; DBR laser; diode laser; grating fabrication; higher order grating; reactive ion etching; ridge waveguide; seventh order grating; single-longitudinal mode emission; single-step process; sixth order grating; wafer stepper lithography; Bragg gratings; Diode lasers; Distributed Bragg reflectors; Epitaxial growth; Etching; Laser modes; Lithography; Optical device fabrication; Semiconductor lasers; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2005. CLEO/Europe. 2005 Conference on
Print_ISBN
0-7803-8974-3
Type
conf
DOI
10.1109/CLEOE.2005.1567889
Filename
1567889
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