Title :
Linear Interpolation of Periodic 633nm in Heterodyne Laser Interferometer for Subnanometer Dimensional Measurement
Author :
Tanaka, M. ; Yamagami, T. ; Nakayama, K.
Author_Institution :
Research Laboratory of Metrology
Abstract :
The heterodyne laser interferometry is discussed on its accuracy in the subnanometer range for precision dimensional measurement. Simplest optical nonpolarization heterodyne interferometer is tried experimentally in order to eliminate the leakage between reference and measuring optical signal and show that the accuracy around 0.1 nm is achieved.
Conference_Titel :
Precision Electromagnetic Measurements, 1988. CPEM 88 Digest. 1988 Conference on
Conference_Location :
Ibaraki, Japan
DOI :
10.1109/CPEM.1988.671216
