• DocumentCode
    2896992
  • Title

    Reactive desorption of barium oxide and scandium oxide from model thin film scandate cathodes

  • Author

    Wan, Congshang ; Kordesch, Martin E.

  • Author_Institution
    Dept. of Phys. & Astron., Ohio Univ., Athens, OH, USA
  • fYear
    2012
  • fDate
    24-26 April 2012
  • Firstpage
    45
  • Lastpage
    46
  • Abstract
    Model scandate cathodes made from sputter-deposited thin films of BaO on Sc2O3 on W fail due to preferential desorption of both BaO and Sc2O3 from areas of the cathode where both oxides were deposited.
  • Keywords
    barium compounds; desorption; scandium compounds; semiconductor thin films; sputter deposition; tungsten; BaO; Sc2O3; W; model thin film scandate cathodes; preferential desorption; reactive desorption; sputter-deposited thin films; Barium; Cathodes; Crystals; Films; Heating; Microscopy; Tungsten; BaO; Sc2O3; scandate;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International
  • Conference_Location
    Monterey, CA
  • Print_ISBN
    978-1-4673-0188-6
  • Electronic_ISBN
    978-1-4673-0187-9
  • Type

    conf

  • DOI
    10.1109/IVEC.2012.6262067
  • Filename
    6262067
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2896992