DocumentCode :
2896992
Title :
Reactive desorption of barium oxide and scandium oxide from model thin film scandate cathodes
Author :
Wan, Congshang ; Kordesch, Martin E.
Author_Institution :
Dept. of Phys. & Astron., Ohio Univ., Athens, OH, USA
fYear :
2012
fDate :
24-26 April 2012
Firstpage :
45
Lastpage :
46
Abstract :
Model scandate cathodes made from sputter-deposited thin films of BaO on Sc2O3 on W fail due to preferential desorption of both BaO and Sc2O3 from areas of the cathode where both oxides were deposited.
Keywords :
barium compounds; desorption; scandium compounds; semiconductor thin films; sputter deposition; tungsten; BaO; Sc2O3; W; model thin film scandate cathodes; preferential desorption; reactive desorption; sputter-deposited thin films; Barium; Cathodes; Crystals; Films; Heating; Microscopy; Tungsten; BaO; Sc2O3; scandate;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2012 IEEE Thirteenth International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4673-0188-6
Electronic_ISBN :
978-1-4673-0187-9
Type :
conf
DOI :
10.1109/IVEC.2012.6262067
Filename :
6262067
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2896992
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